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Workstation
l Optics and stages mounted on internal granite on vibration isolators
l Ray MAX software for system control
l Interlocked work area door with laser safe viewing window
l Workstation size: 1100 mm [W] x 1100 mm [D] x 1850 mm [H]
- Laser
l Laser type: TEM00
l Wavelength: 532nm
l Average power: 15 W
- Optical system
l Spot size: < 30 um
l Scanning Area: 212mm x 212mm (f=330)
- Substrate mount
l Vacuum chuck for 156mm x 156mm wafer
l Levellable by precision screws
- Motion stage
l Travel range: 400 mm (X/Z stage – Linear motor)
l Resolution: 5 µm