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Laser Doping Machine
 
 

Laser Doping Machine

 

  Â÷¼¼´ë ¿¡³ÊÁö¿øÀ¸·Î °¢±¤¹Þ°í Àִ ž籤 ¹ßÀü¿¡¼­ °¡Àå Áß¿äÇÑ °ÍÀº ¿¡³ÊÁö º¯È¯È¿À²À» Çâ»ó½ÃŰ´Â ±â¼úÀÔ´Ï´Ù. žçÀüÁöÀÇ È¿À²À» ³ôÀ̱â À§Çؼ­´Â ž籤 ¸ðµâÀ» ¸¸µé ¶§ ½Ç¸®ÄÜ ±âÆÇ À§¿¡ ±Ý¼ÓÀü±ØÀ» ºÙÀÌ´Â °úÁ¤¿¡¼­ Á¢ÃË ÀúÇ×À» ÁÙ¿©¾ß ÇÕ´Ï´Ù. 532nm ÆÄÀåÀÇ ·¹ÀÌÀú¸¦ Ȱ¿ëÇÏ¿© ±Ý¼ÓÀü±ØÀÇ Á¢ÃË ºÎºÐ¿¡´Â °í³óµµ µµÇÎÀ» ÇÏ°í ´Ù¸¥ ºÎºÐ¿¡´Â µµÇÎÀ» ¾ã°Ô ÇÏ´Â '¼±ÅÃÀû ¿¡¹ÌÅÍ' ±¸Á¶¸¦ ¸¸µé¸é Á¢ÃË ÀúÇ×À» ÁÙÀÏ ¼ö ÀÖÀ¸¸ç, ·¹ÀÌÀú µµÇÎ ±â¼úÀº ±âÁ¸ÀÇ º¹ÀâÇÑ ¹æ¹ýÀ» °£¼ÒÈ­ÇØ¼­ °øÁ¤¿¡ ¼Ò¿äµÇ´Â ºñ¿ëÀ» Å©°Ô ÁÙÀÌ°í ¿¡³ÊÁö º¯È¯È¿À²µµ ³ôÀÏ ¼ö ÀÖ´Â Àϼ®ÀÌÁ¶ÀÇ ±â¼úÀÔ´Ï´Ù.

 

 Workstation

 

l  Optics and stages mounted on internal granite on vibration isolators

l  Ray MAX software for system control

l  Interlocked work area door with laser safe viewing window

l  Workstation size: 1100 mm [W] x 1100 mm [D] x 1850 mm [H]

 

    - Laser

 

  l  Laser type: TEM00

l  Wavelength: 532nm

l  Average power: 15 W

 

    - Optical system

 

l  Spot size: < 30 um

l  Scanning Area: 212mm x 212mm (f=330)

 

    - Substrate mount

 

l  Vacuum chuck for 156mm x 156mm wafer

l  Levellable by precision screws

 

    - Motion stage

 

l  Travel range: 400 mm (X/Z stage – Linear motor)

l  Resolution: 5 µm

 

 
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